Thermal Oxidation. Diffusion. Ion Implantation.Deposition. Harold G. Parks Lithography and Pattern Transfer The University of Arizona, Tucson 23.2 Testing Built-In Self-Test- Scan. Direct Access Testing ng· Joint TestAction
3. Process Equipment/Machinery 3.1 Adequate equipment layout avoiding congestion 3.1.1 The design and layout of the factory and equipment must ensure efficient production of safe products and allow access for adequate cleaning and pest control