Controlling is the process whereby mana- gers monitor and regulate how efficiently and effectively an organization and its members are performing the activities nece- ssary to achieve organizational goals. 控制标准:实物,成本,资本,收益, 无形
REGULAR PATTERN OF GROWTH AND DEVELOPMENT continuous process Different rate of development in various systems General pattern Individual variance Puberty13yr(F)/15yr(M)
Chapter 12 Time Series Analysis 12.1 Stochastic processes A stochastic process is a family of random variables {Xt,t ET}. Example{St,t 0, 1,2,...} where St i=o X; and iid(0,2). St has a different distribution at each point t
What does Materials Science have to do with Microelectronic Processing? Need to understand DIfferences: metals, oxides and semiconductors Atomic bonding Oxidation rates, compound formation(GaAs)
Processes: gift of Slo2-Expose Si to steam = uniform insulating layer or metal film growth: high vacuum, single element Contrast with CVD: toxic, corrosive gas flowing through valves
Alternative materials and fabrication techniques Applications in biology and chemistry Applications in medicine A real MTL example of rapid prototyping
Why do we need metallization?- To connect devices electrically to each other and to the outside world; power and data Local interconnect doped polySi, silicides Packaging
Rellablllty of semiconductor I CS plus spin-based electronics 6. 12J/3.155J Microelectronic processing Read Campbell, p. 425-428 and Ch. 20 Sec. 20.1, 20.2: Plummer, Sec. 11.5.6 IC reliability: Yield=( operating parts)/(total# produced) Particles on surface interrupt depositions, flaw devices