We saw oⅴD Gas phase reactants: po l mTorr to l atm Good step coverage, T> 350 K We saw sputtering Noble (+ reactive gas)p 10 mTorr; ionized particles Industrial process high rate reasonable step coverage
Systems Engineering and Lean Thinking Systems Engineering grew out of the space industry in response to the need to deliver technically complex systems that worked flawlessly upon first use SE has emphasized technical performance and risk management of complex systems