一、MEMs发展简介 二、MEMs的制备技术基础 三、典型应用的MEMs

一、薄膜的形核理论 二、连续薄膜的形成 三、薄膜微观结构的形成 四、非晶薄膜、薄膜织构和外延薄膜 五、薄膜的应力和附着力

一、薄膜图形化的光刻技术 二、光刻使用的等离子体刻蚀技术 三、等离子体刻蚀机制 四、未来的纳米光刻技术

I feel that this award was not made to me as a man, but to my work -- a life's work in the agony and sweat of the human spirit, not for glory and least of all for profit, but to create out of the materials of the human spirit something which did not exist before. So this award is only mine in trust. It will not be dif ficult to find a dedication for the money part of it commensurate with the purpose and significance of its origin. But I would like to do the same with the acclaim too, by using this moment as a pinnacle

Modified atmosphere packaging (MAP) may be defined as ‘the enclosure of food products in gas-barrier materials, in which the gaseous environment has been changed’ (Young et al, 1988). Because of its substantial shelf-life extending effect, MAP has been one of the most significant and innovative growth areas in retail food packaging over the past two decades. The potential advantages and disadvantages of MAP have been presented by both Farber (1991) and Parry (1993), and summarised by Davies (1995) in Table 16.1

The safe and reliable long-term disposal of solid waste residues is an important component of integrated waste management. Solid waste residues are waste components that are not recycled, that remain after processing at a materials recovery facility, or that remain after the recovery of conversion products and/or energy. Historically, solid waste has been placed in the soil in the earth's surface or deposited in the oceans

Characteristics of Solids Bonding Electrons in Solids Band Theory Defects Semiconductor Classification of Solids There are several forms solid state materials can adapt

The control of particulates and VOCs is mostly accomplished by physical processes (cyclones, ESPs, filters, leakage control, vapor capture, condensation) that do not involve changing the chemical nature of the pollutant. Some particles and VOCs are chemically changed into harmless materials by combustion. This chapter and the next concern pollutants--sulfur oxides and nitrogen

Common, everyday water is a major consideration in a pharmaceu￾tical plant. The final product or any of its intermediate materials can only be as contaminant-free as the water available at that stage. Water may be an ingredient or used principally to wash and rinse product contact components and equipment. Water is also used to humidiethe air, to generate clean steam for sterilization, to cool or heat, as a solvent, for drinking and sanitary uses, etc. To better control this critical media

83.1 Light-Emitting Diodes Semiconductor Device Principles • Semiconductor Materials • Device Efficiency • Interfacing 83.2 Liquid-Crystal Displays Principle of Operation • Interfacing 83.3 The Cathode Ray Tube