Covers materials in lectures from 10/15 through 11/26 Does not include Lab Lectures A formula sheet will be provided (if needed) Lecture on Monday, Dec. 8th Lab tour of Analog Devices MEMS Facility We will leave from the classroom at 2: 35PM SHARP

lasma enhanced surface diffusion without need for Dry etching Momentum transfer from plasma to remove surface species e We will see evaporation: Evaporate

Closed book Covers lecture materials covered in problem sets through lithography Five questions, 20 pts. each a formula sheet will be provided a Sample quizzes from previous terms and the formula sheet are on the course web site Spring 2003 -Prepared by C. ross

Doping and diffusion I Motivation Faster MOSFET requires Requires shallower source, drain Ar P* poly snorter channel

Microelectronics letters journals IEEE Electron Device letters Applied physics Letters Available online at libraries mit edu Click on vera (Virtual Electronic Resource Access)

Why spend a whole lecture on oxidation of Si? Ge has high ue, Wh, Ge stable but no oxide GaAs has high ue and direct band Why sio? Sio, is stable down to 10 9 Torr. T>900C Sio can be etched with hf which leaves si unaffected

What does Materials Science have to do with Microelectronic Processing? Need to understand DIfferences: metals, oxides and semiconductors Atomic bonding Oxidation rates

Briefing Summary US Navy Acquisition Process Overview F/A-18 Aircraft Overview Flight Control Law Software Upgrade Program Requirements Constraints and Challenges Results

Chapter One Introduction Heat: Heat is a kind of energy, Which occurs in the transfer process. (the transferred energy contains the orderly work and disorderly heat) Energy: Concept of energy is used to specify the state of a system in thermodynamics Heat Transfer: kind of application science, is concerned with analysis of the rate of heat transfer taking place in system, or with the research on the heat-transfer reqularity

Medical Genetics Genetic counseling is the process evaluating family history and medical records ordering genetic tests evaluating the results of this investigation helping parents understand and reach decisions about what to do next