We saw oⅴD Gas phase reactants: po l mTorr to l atm Good step coverage, T> 350 K We saw sputtering Noble (+ reactive gas)p 10 mTorr; ionized particles Industrial process high rate reasonable step coverage

Module 4: Processes进程 1、Process Concept进程概念 2、Process Scheduling进程调度 4、Operation on Processes进程上的操作 5、Cooperating Processes协同进程 6、Interprocess Communication进程间通信

❖ 5.1 The performance of Catalysts in Chemical reaction ❖ 5.2 Green Chemistry and Catalysis ❖ 5.3 The Design of High Efficient and Safe Catalyst ❖ 5.4 Changing Starting Material for Chemical reaction ❖ 5.5 Changing Reagents ❖ 5.6 Changing the solvent of Chemical Reaction ❖ 5.7 Process Control and Process Intensification ❖ References

We saw how dopants were introduced into a wafer by using diffusion (predepositionanddrive-in') This process is limited cannot exceed solid solubility of dopant -difficult to achieve light dopin Ion implantation is preferred because controlled, low or high dose can be

I. Personal selling I. Personal selling II. Role of Sales force II. Role of Sales force III. Sales force management III. Sales force management IV. Selling process IV. Selling process V. Customer Relationship V. Customer Relationship Management Management

I. The Communication Process I. The Communication Process II. Integrated Marketing II. Integrated Marketing Communications Communications III. Advertising III. Advertising

I. Managing Marketing Efforts I. Managing Marketing Efforts II. Organizing the Marketing II. Organizing the Marketing Department Department III. Four skills needed for III. Four skills needed for effective implementation effective implementation IV. Types of Control IV. Types of Control V. Marketing Control Process V. Marketing Control Process VI. Marketing Audits VI. Marketing Audits

I. The Importance of I. The Importance of information information II. The Marketing Information II. The Marketing Information System III. The Marketing Research III. The Marketing Research Process Process IV. Research Plan Designing IV. Research Plan Designing and Execution and Execution

I. Characteristics of Business I. Characteristics of Business Markets Markets II. Model of Business Buying II. Model of Business Buying Behavior Behavior III. Business Buying Situations III. Business Buying Situations and Process and Process IV. Value Building and Relationship IV. Value Building and Relationship Marketing Marketing V. Internal Marketing V. Internal Marketing

Review of process Structures to be tested Sheet resistance MOS Capacitor Fall 2003-MA schmidt