PI-Si,N. Phosphide-silicate glass Second metal (TiN/Al/Ti) PI-SiO Spin-on Spin-on Spin-on glass glass glass PLSiO Boron-phosphide-silicate glass Cell plate Ferroelectric capacitor First metal (TiN/Al/TiN/Ti Storage node Polycide bit Polysilicon 月 Word集成电路主要流程