Process Control plants 16.422 Continuous or batch processing Examples: Electricity generation(nuclear power plants), refineries, steel production, paper mills, pasteurization of milk Characterized by Large scale, both physically and conceptually Complex

2.1 Preface to the thermodynamics 2.2 The thermodynamic first law 2.3 Quasi-static process and reversible process 2.4 Enthalpy 2.5 Heat capacity 2.6 The first law in ideal gases 2.7 Thermochemistry 2.8 The Hess’s law 2.9 Heat in some processes 2.10 The temperature dependence of the reaction enthalpy —— Kirchhoff’s law 2.11 An adiabatic reaction ——non-isothermal reaction

2.1 Preface to the thermodynamics 2.2 The thermodynamic first law 2.3 Quasi-static process and reversible process 2.4 Enthalpy 2.5 Heat capacity 2.6 The first law in ideal gases 2.7 Thermochemistry 2.8 The Hess’s law 2.9 Heat in some processes 2.10 The temperature dependence of the reaction enthalpy —— Kirchhoff’s law 2.11 An adiabatic reaction ——non-isothermal reaction

Massachusetts Institute of Technology POLY GATE MOSCAP PROCESS SUMMARY Lab session 1 1. 1 Lab Safety and Cleanroom Orientation 1.2 RCA ( ICL RC 1.3 Gate Oxidation Thermco Atmospheric Furnace(5D-FieldOx

We saw oⅴD Gas phase reactants: po l mTorr to l atm Good step coverage, T> 350 K We saw sputtering Noble (+ reactive gas)p 10 mTorr; ionized particles Industrial process high rate reasonable step coverage

1.(Plummer 10.3)In a certain process, it is desired that the pitch of metal lines be equal to or less than 1.Omm(the pitch equals one metal linewidth plus one spacing between metal lines, measured at top of features). Assume that the metal linewidth and spacing are

We saw how dopants were introduced into a wafer by using diffusion (predepositionanddrive-in') This process is limited cannot exceed solid solubility of dopant -difficult to achieve light dopin Ion implantation is preferred because controlled, low or high dose can be

3. Process Equipment/Machinery 3.1 Adequate equipment layout avoiding congestion 3.1.1 The design and layout of the factory and equipment must ensure efficient production of safe products and allow access for adequate cleaning and pest control

Total Quality Management (TQM) Theory of Process Management The Theory of Control Charts Common Cause Variation Vs Special Cause Variation Control Charts for the Proportion of Nonconforming Items Process Variability Control charts for the Mean and the Range

To learn the objectives of questionnaire esign. To understand the role of the questionnaire in the data collection process. To become familiar with the criteria for a good questionnaire. To learn the process for questionnaire design