一、实验目的 每位同学以自己选择的英文文献为线索 ，通过阅读文献和其他的相关材料，达到较 深入地了解薄膜材料制备技术领域某一具体 课题的目的

一、等离子体的一般性质 二、等离子体辅助CVD的机理和特点 三、等离子体辅助的CVD方法

一、CVD过程中典型的化学反应 二、CVD过程的热力学 三、 CVD过程的动力学 四、CVD过程的数值模拟技术 五、CVD薄膜沉积装置

一、MEMs发展简介 二、MEMs的制备技术基础 三、典型应用的MEMs

一、薄膜的形核理论 二、连续薄膜的形成 三、薄膜微观结构的形成 四、非晶薄膜、薄膜织构和外延薄膜 五、薄膜的应力和附着力

一、薄膜图形化的光刻技术 二、光刻使用的等离子体刻蚀技术 三、等离子体刻蚀机制 四、未来的纳米光刻技术

I feel that this award was not made to me as a man, but to my work -- a life's work in the agony and sweat of the human spirit, not for glory and least of all for profit, but to create out of the materials of the human spirit something which did not exist before. So this award is only mine in trust. It will not be dif ficult to find a dedication for the money part of it commensurate with the purpose and significance of its origin. But I would like to do the same with the acclaim too, by using this moment as a pinnacle

Modified atmosphere packaging (MAP) may be defined as ‘the enclosure of food products in gas-barrier materials, in which the gaseous environment has been changed’ (Young et al, 1988). Because of its substantial shelf-life extending effect, MAP has been one of the most significant and innovative growth areas in retail food packaging over the past two decades. The potential advantages and disadvantages of MAP have been presented by both Farber (1991) and Parry (1993), and summarised by Davies (1995) in Table 16.1

The safe and reliable long-term disposal of solid waste residues is an important component of integrated waste management. Solid waste residues are waste components that are not recycled, that remain after processing at a materials recovery facility, or that remain after the recovery of conversion products and/or energy. Historically, solid waste has been placed in the soil in the earth's surface or deposited in the oceans

Characteristics of Solids Bonding Electrons in Solids Band Theory Defects Semiconductor Classification of Solids There are several forms solid state materials can adapt