What does Materials Science have to do with Microelectronic Processing? Need to understand DIfferences: metals, oxides and semiconductors Atomic bonding Oxidation rates, compound formation(GaAs)
Preamble This note has been written for a b asic course in robust and optimal control at 9th term of the ystem Construction Line, Institute of Electronic Systems, Aalborg University. Originall the note was intended for a course consisting of six modules of four hours each. Currently