Detailed studies of unit 8 L1 Seen from the space. When our planet is seen from space L4. average n.平均数;平均标准Tom' s work is above/ below/ about up to the average
We saw oⅴD Gas phase reactants: po l mTorr to l atm Good step coverage, T> 350 K We saw sputtering Noble (+ reactive gas)p 10 mTorr; ionized particles Industrial process high rate reasonable step coverage