上海交通大学：材料科学与工程学院《微纳制造原理与技术》研究生课程教学大纲.pdf_大学文库

上海交通大学研究生院研究生课程教学大纲（Syllabus）*学时*学分课程代码32MSE8351CreditsCourseCodeTeaching Hours微纳制造原理与技术*课程名称CourseNameMicro-Nano Manufacturing: Principle and Technology*授课语言中文ChineseInstructionLanguage*开课院系(050)材料科学与工程学院SchoolSchoolofMaterialsScience&Engineering先修课程无Prerequisite姓名Name职称Title单位Department联系方式E-mail授课教师材料科学与工程学院林路禅LIN副教授Associateluchan.lin@sjtu.InstructorsSchool of Materialsedu.cnLuchanProfessorScience&Engineering随着高端器件不断向小型化方向发展，在芯片制造、航空航天、国防、生物、医疗等众多领域，无论是微纳机电系统零部件还是宏机电系统零部件上的微细结构，其加工制造都变得异常困难，传统制造技几乎无能为力，严重制约尖端制造业的发展。微纳制造技术是针对微毫米量级的零件，以及由这些零件构成和绒的部件或系统的设计主要研究特征尺寸在微米、*课程简介（中纳米范围的材料、功能结构的科学问题，涉及材料、物理、2文）Course化学、生物等多学科交实验教学、课堂交流讨论Description等多个教学环节，将微纳制造技术从技术原理、技术手段、金属与非金属微纳制造、微纳结构成形与器件开发应用等多角度进行介绍，使学生掌握微纳制造技术的基本理论、基本知识和基本技能，了解常用微纳制造的技术手段、工艺方法、应用需求等相关知识，并能够采用微纳制造技术解决科研与工程实践过程中遇到的实际问题，使学生的创新能力与综合实践能力得到提高。With the continuous development of high-end devices towards miniaturization, not onlythe micro-nano electromechanical system components, but also the micro-structures onthecomponents ofmacro electromechanical systemsforapplications innumerousfieldssuch as chip manufacturing,aerospace, national defense, biology,and medicine, theirprocessingandmanufacturinghavebecomeextremelydifficult.Conventionalmanufacturing technologies are almost ineffective, which severely restricts thedevelopment of the cutting-edge manufacturing industry. Micro-Nano manufacturingtechnology is a technology for the design, processing, assembly, integration, and*课程简介applicationofparts atthemicro-millimeter,micrometer,and nanometer scales,as well as(English)componentsor systemscomposedoftheseparts.ItmainlyfocusesonthefundamentalCoursescience in the design and manufacturing of materials, functional structures, devices andDescriptionsystems with characteristic dimensions in the micrometer and nanometer range, whichinvolves the interdisciplinaryintegration of multiple disciplines such as materials,physics,chemistry,and biology.Throughmultipleteachinglinks suchaslectures,experimentalteaching, and classroom communication and discussion, this course will introducemicro-nano manufacturingtechnology from multiple perspectives,including technicalprinciples, technical methods, micro-nano manufacturing of metals and non-metals,micro-nano structures fabrication and the development of devices. It aims to enablestudents tomaster thebasic theories, knowledge, and skills ofmicro-nano manufacturing

上海交通大学研究生院研究生课程教学大纲（Syllabus）课程代码 Course Code MSE8351 *学时 Teaching Hours 32 *学分 Credits 2 *课程名称 Course Name 微纳制造原理与技术 Micro-Nano Manufacturing: Principle and Technology *授课语言 Instruction Language 中文 Chinese *开课院系 School (050)材料科学与工程学院 School of Materials Science & Engineering 先修课程 Prerequisite 无授课教师 Instructors 姓名 Name 职称 Title 单位 Department 联系方式 E-mail 林路禅 LIN Luchan 副教授 Associate Professor 材料科学与工程学院 School of Materials Science & Engineering luchan.lin@sjtu. edu.cn *课程简介（中文）Course Description 随着高端器件不断向小型化方向发展，在芯片制造、航空航天、国防、生物、医疗等众多领域，无论是微纳机电系统零部件，还是宏机电系统零部件上的微细结构，其加工制造都变得异常困难，传统制造技术几乎无能为力，严重制约尖端制造业的发展。微纳制造技术是针对微毫米、微米和纳米量级的零件，以及由这些零件构成的部件或系统的设计、加工、组装、集成与应用技术，主要研究特征尺寸在微米、纳米范围的材料、功能结构、器件与系统设计制造中的科学问题，涉及材料、物理、化学、生物等多学科交叉融合。本课程将通过课堂授课、实验教学、课堂交流讨论等多个教学环节，将微纳制造技术从技术原理、技术手段、金属与非金属微纳制造、微纳结构成形与器件开发应用等多角度进行介绍，使学生掌握微纳制造技术的基本理论、基本知识和基本技能，了解常用微纳制造的技术手段、工艺方法、应用需求等相关知识，并能够采用微纳制造技术解决科研与工程实践过程中遇到的实际问题，使学生的创新能力与综合实践能力得到提高。 *课程简介（English） Course Description With the continuous development of high-end devices towards miniaturization, not only the micro-nano electromechanical system components, but also the micro-structures on the components of macro electromechanical systems for applications in numerous fields such as chip manufacturing, aerospace, national defense, biology, and medicine, their processing and manufacturing have become extremely difficult. Conventional manufacturing technologies are almost ineffective, which severely restricts the development of the cutting-edge manufacturing industry. Micro-Nano manufacturing technology is a technology for the design, processing, assembly, integration, and application of parts at the micro-millimeter, micrometer, and nanometer scales, as well as components or systems composed of these parts. It mainly focuses on the fundamental science in the design and manufacturing of materials, functional structures, devices and systems with characteristic dimensions in the micrometer and nanometer range, which involves the interdisciplinary integration of multiple disciplines such as materials, physics, chemistry, and biology. Through multiple teaching links such as lectures, experimental teaching, and classroom communication and discussion, this course will introduce micro-nano manufacturing technology from multiple perspectives, including technical principles, technical methods, micro-nano manufacturing of metals and non-metals, micro-nano structures fabrication and the development of devices. It aims to enable students to master the basic theories, knowledge, and skills of micro-nano manufacturing

上海交通大学研究生院 technology, understand relevant knowledge such as the common technical approaches, methods, and application requirements of micro-nano manufacturing, and be able to use micro-nano manufacturing technology to solve practical problems encountered in the scientific research and engineering practice, so as to improve students' innovative ability and comprehensive practical ability. *教学安排 Schedules 教学内容 Content 授课学时 Hours 教学方式 Format 授课教师 Instructor 微纳制造原理与技术课程概述 2 课堂讲授林路禅光学曝光系统及技术 2 课堂讲授林路禅高能束微纳加工工艺 4 课堂讲授林路禅纳米压印技术 2 课堂讲授林路禅刻蚀技术 2 课堂讲授林路禅薄膜技术 2 课堂讲授林路禅自组装技术 2 课堂讲授林路禅微纳增材制造技术 3 课堂讲授林路禅微纳制造应用技术 2 课堂讲授林路禅实验 1：超快激光微纳制造实验室 2 实验教学林路禅实验 2：表面微流道加工制造 2 实验教学林路禅实验 3：表面微织构与着色 2 实验教学林路禅实验 4：金属与陶瓷微孔加工 2 实验教学林路禅课外展示 2 交互课堂林路禅总结评价 1 交互课堂林路禅 *考核方式 Grading Policy 课程实验 40 分，课程展示 20 分，期末考试 40 分 *教材或参考资料 Textbooks & References 1. 塔亚布·苏拉特瓦拉著. 光学制造中的材料科学与技术，上海科技技术出版社， 2023 2. Shanalyn A. Kemme 编著，微光学和纳米光学制造技术，机械工业出版社，2012 3. 顾长志等，微纳加工及在纳米材料与器件研究中的应用，科学出版社，2021 4. 李岩，颜文煅等，微纳加工基础技术与方法，冶金工业出版社，2021 5. Maria Stepanova, Steven Dew, Nanofabrication: Techniques and Principles, Springer, 2012 6. Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, CRC Press, 2011