柔性传感器 Flexible Sensors 56
柔 性 传 感 器 Flexible Sensors
研究背景 Intracranial sensors/EEG/ECoG 脑电信号 声音 Voice recognition Eye fatigue 眼电监测 Heart rate/ECG Intraocular pressure Cardiac ablation therapy Smart lens 呼吸(气体种类,浓度,频次,幅度 心脏 Self-powered pacemaker Lung motion harvesting呼吸(频次) Blood pressure Blood flow/oxygen Blood glucose 血压,血氧,葡萄糖 Neural interfaces Drug delivery Smart wristband 可穿戴设备 手持设备Foldable electronics Mechanoreceptors 人工神经 肌电 EMG/Muscle activity Artificial nerves Plantar pressure Gait analysis 足底压力
研究背景 脑电信号 呼吸(气体种类,浓度,频次,幅度) 声音 心脏 呼吸(频次) 足底压力 血压,血氧,葡萄糖 肌电 手持设备 可穿戴设备 眼电监测 人工神经
制备技术 Sensitive Active Area 好 Organic Semiconductors-Electrodeposition 9 Perovksites →Solution Black Phosphorus Mechanical exfoliation TMDs- →Chemical exfoliation Graphene LCVD Polysilicon PECVD SiNMs- Transfer Metal Oxides +Sputtering Contacts Metal thin films Evaporation ITO Sputtering Graphene CVD EGaln Solution AgNWs CNTs Dielectric 广+ALD Sio, L.Sputtering PVA- PECVD PVDF-TrFE Solution Processes Parylene-C-Evaporation Substrate Polyimide(PI).Polyester PET ·PDMS PEN Paper Cotton ·Flexible Glass Technologies 2019,7(2),35 Common materials and respective fabrication methods
Technologies 2019, 7(2), 35 Common materials and respective fabrication methods 制备技术
6 典型应用 Transmission gain (mV G=dlV vdRs IGi (mV N-) Rigid circuits in 05 Cloud the clothes 0.4 -2 0.2 Soft sensors 01 Regime I on the skin (conventional tag) 00 .0 30507090 (MHz) (slave) Wearable body area sensor network system Heart rate ● Bluetooth BPM:62 @ ●Ps 80om回Eh Breath rate ● Sensor nodes RFID signal processing Bluetooth BPM:17 (master) Arm movement ● Count:3 Reset 2 Leg movement ● ●Movement Right:1 Reset Movement signal Left:1 Reset RFID processing 2 Soft sensors form a network
Soft sensors form a network 典型应用
汗液传感器 nature 总计 2014年至今 REVIEW ARTICLE http5:/doi.org/101038/541928-0m8-0043-y electronics 用 419 2565 h指数 92 1 10物致 23 225 6000 Wearable sweat sensors 4500 3000 Mallika Bariya23,Hnin YinYin Nyein 23 and Ali Javey 2.3* 1500 2012201320142015201620172012019 Sweat potentially contains a wealth of physiologically relevant information,but has traditionally been an underutilized resource for non-invasive health monitoring.Recent advances in wearable sweat sensors have overcome many of the historic drawbacks of sweat sensing and such sensors now offer methods of gleaning molecular-level insight into the dynamics of our bodies.Here we review key developments in sweat sensing technology.We highlight the potential value of sweat-based wearable sensors, examine state-of-the-art devices and the requirements of the underlying components,and consider ways to tackle data integ- rity issues within these systems.We also discuss challenges and opportunities for wearable sweat sensors in the development of personalized healthcare. Nature Electronics,2018,1,160-171
汗液传感器 Nature Electronics, 2018, 1, 160–171
好 Big data Preventive care Cloud computing Fitness tracking 6 分 Continuous momonng Mins Hours Days ● 0 -Predictive algorithms Diagnosis and health monitorng Big data for human health. Nature Electronics,2018,1,160-171
Nature Electronics, 2018, 1, 160–171 Big data for human health
96 Table 1 Analytes in sweat and select detection methods Analyte Concentration in sweat Recognition element Sensing modality Na 10-100mM Na ionophore Potentiometry cr 10-100mM Ag/AgCl K+ 1-18.5mM K ionophore Ca2+ 0.41-12.4mM Ca ionophore pH 3-8 Polyaniline NH4+ 0.1-1mM Ammonium ionophore Glucose 10-200μM Glucose oxidase Chronoamperometry Lactate 5-20mM Lactate oxidase Ethanol 2.5-22.5mM Alcohol oxidase Uric acid 2-10mM Carbon Cyclic voltammetry Ascorbic acid 10-50μM Carbon Zn2+ 100-1,560μg日 Bi Square wave stripping voltammetry Cd2+ <100 Hg Bi Pb2+ <100μg Bi,Au Cu2+ 100-1,000μgH Au Hgt <100μg Au Cortisol 8-140 ng ml-1 ZnO,MoS2 Electrochemical impedance spectroscopy F17464 Graphite Differential pulse voltammetry ions,metabolites,acids,hormones,and small proteins and peptides Nature Electronics.2018.1.160-171
Nature Electronics, 2018, 1, 160–171 ions, metabolites, acids, hormones, and small proteins and peptides
好 6 e Mask Sensor flipped-over Antenna against skin Hydrogel pads ●●9 lonto Circuitry (under Sensor protective textile) 日ectrode assembly Electronic Back lit Frontlit components d 835 65 U 1.cm 1 cm Wearable sweat sensors. Nature Electronics,2018,1,160-171
Nature Electronics, 2018, 1, 160–171 Wearable sweat sensors
压力传感器 Hear aids Ultra sensitive e-skin Daily activities Weight and height measurement 37.5K Acoustic pressure Pa 1 kPa Lo kPa 100 kPa Ultra-low-pressure Subtle-pressure Low-pressure Medium-pressure Microphone Touch screen Medical diagnosis Health monitoring Mater:Horiz..,2015,2,140-156
压力传感器 Mater. Horiz., 2015, 2, 140-156
a) Ti/Au electrode pressure】 piezoresistivity Au NWs b) >electrode ionic conductor V pressure 个 capacitance cm dielectric Piezo-phototronics c) Drain Force Dielectrics Semidinductor Top electrode Piezotronics Optoelectronics Field effect transistor Wrap-gate Strain-gated piezoelectricity piezotronic Piezoelectncity Photoexiatation ransistor Nanowire Source Bottom electrode Piezophotonics
piezoresistivity capacitance piezoelectricity